Beam steering system and spatial filtering applied to interference lithography
نویسندگان
چکیده
Production of metrologically accurate interference patterns with subnanometer fidelity requires precise control of beam position and angle. We consider the beam stability requirements for the cases of interference by plane and spherical waves. Interferometers using beamsplitter cubes and diffraction gratings are among the analyzed topologies. The limitations of spatial filtering to remove angular variations are also discussed. We present a beam steering system that uses position sensing detectors, tip-tilt actuators, and digital control to lock the beam position and angle at the interference lithography system. We describe the prototype’s performance and limitations of this approach. This beam steering system allows us to locate the laser far ~;10 m! from the sensor assembly, thereby reducing the thermal and mechanical disturbances at the lithography station and allowing sharing of the laser between different lithography tools. © 2000 American Vacuum Society. @S0734-211X~00!02806-7#
منابع مشابه
Generalized scanning beam interference lithography system for patterning gratings with variable period progressions
We demonstrate a versatile interference lithography system that can continuously vary the pattern period and orientation during fabrication of general periodic structures in one or two dimensions. Initial experimental results, using closed-loop beam steering control and double exposures on a stationary substrate, are obtained in order to illustrate its principle of operation. A fringe-locking s...
متن کاملFabrication and Optical Characterization of Silicon Nanostructure Arrays by Laser Interference Lithography and Metal-Assisted Chemical Etching
In this paper metal-assisted chemical etching has been applied to pattern porous silicon regions and silicon nanohole arrays in submicron period simply by using positive photoresist as a mask layer. In order to define silicon nanostructures, Metal-assisted chemical etching (MaCE) was carried out with silver catalyst. Provided solution (or materiel) in combination with laser interference lithogr...
متن کاملDelay Spoofing Reduction in GPS Navigation System based on Time and Transform Domain Adaptive Filtering
Due to widespread use of Global Positioning System (GPS) in different applications, the issue of GPS signal interference cancelation is becoming an increasing concern. One of the most important intentional interferences is spoofing signals. An effective interference (delay spoof) reduction method based on adaptive filtering is developed in this paper. The principle of method is using adaptive f...
متن کاملCyclic additional optical true time delay for microwave beam steering with spectral filtering.
Optical true time delay (OTTD) is an attractive way to realize microwave beam steering (MBS) due to its inherent features of broadband, low-loss, and compactness. In this Letter, we propose a novel OTTD approach named cyclic additional optical true time delay (CAO-TTD). It applies additional integer delays of the microwave carrier frequency to achieve spectral filtering but without disturbing t...
متن کاملExtreme ultraviolet interference lithography with incoherent light
In order to address the crucial problem of high-resolution low line-edge roughness resist for extreme ultraviolet (EUV) lithography, researchers require significant levels of access to high-resolution EUV exposure tools. The prohibitively high cost of such tools, even microfield tools, has greatly limited this availability and arguably hindered progress in the area of EUV resists. To address th...
متن کامل